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Trimos TR Scan Premium are crafted by Trimos to deliver the Swiss made precision Nano-tech Topographical Analysis on your fabrication floor as well as laboratory. Thanks to its astounding speed and precision optical sensor, Trimos TR Scan Premium is optimized for hi-tech applications which conform to 3D standard ISO 25178. The Trimos TR Scan Premium is based on the physical characteristics of the hologram for the topography generation of the analysed surface. The heart of the system, Trimos DHM® (Digital Holographic Microscopy), constitutes a derivation of a technology used in the biomedical engineering field.
Trimos TR Scan Premium technology for checking industrial surfaces is a distinctive feature in measuring extreme reflecting, mirror-polished or very small surfaces. The exceptional high measuring speed coupled with an accuracy range of a nanometer, form the main advantages of the Trimos TR Scan Premium. Only some microseconds are needed for the acquisition of a three dimensional image (x, y, z) with a million points.
This exceptional acquisition speed allows ignoring all problems traceable to vibrations, the traditional enemy of the majority of optical measuring systems. Trimos TR Scan Premium will improve your scope of investment in fabrication of medical appliances, prosthesis, wafers, MEMS, semiconductors, metallic layers deposits, polymer films, optical components, research and development.
Trimos TR Scan Premium Features:
Trimos TR Scan Premium Standard Delivery:
Trimos TR Scan Premium
Trimos TR Scan Premium Application
Trimos TR Scan Premium Ordering Guide:
Technical Stage | 101 | 301 | |
Horizontal measuring range X | mm | - | 100 |
Horizontal measuring range Y | mm | - | 100 |
Vertical measuring range Z | mm | 240 | |
Measuring system resolution XYZ | µm | 0.1 | |
Positioning accuracy XYZ | µm | 1 | |
Rectitude of the guideways XY | µm | 0.3 | |
Max. weight of the part | kg | 20 |
Trimos TR Scan Premium Measuring Probes Selection
DHM S1 | DHM S2 | CCM P1 | DIA P1 | ||
Vertical resolution (Z) | nm | 0.1 | 0.1 | 8 ÷ 780 | 10 |
Lateral resolution (XY) | µm | 0.6 | 0.6 | 0.9 ÷ 14 | 1 |
Typical measuring range Ra | µm | 0.4 | 1.6 | 0.012 ÷ 200 | 20 |
Vertical measuring range | µm | 3 | 7 | 130 ÷ 24000 | 350 |
Max. permissible errors Ra | % | 1% | 1% | 1% ÷ 5% | 5% |
Repeatability (Ra, 1σ) | nm | <0.1 | <0.1 | 9 | |
Sample reflectivity | % | <1% ÷ 100% | <1% ÷ 100% | 1% ÷ 100% | - |
Field of view | mm | 0.25 x 0.25 | 0.25 x 0.25 | - | - |
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